Scanning probe microscope head design
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United States of America Patent
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Jun 14, 2016
Grant Date -
Jan 28, 2016
app pub date -
Jul 22, 2015
filing date -
Jul 22, 2014
priority date (Note) -
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Abstract
A SPM head incorporates a probe and a cantilever on which the probe is mounted. The cantilever has a planar reflecting surface proximate a free end of the cantilever. The cantilever extends from a mechanical mount and a single-mode optical fiber is supported by the mechanical mount to provide a beam axis at an angle away from normal relative to the reflecting surface.
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