Variable density scanning
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United States of America Patent
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Jun 14, 2016
Grant Date -
Dec 31, 2015
app pub date -
Jun 30, 2015
filing date -
Jan 31, 2006
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Abstract
Systems and techniques for varying a scan rate in a measurement instrument. The techniques may be used in scanning probe instruments, including atomic force microscopes (AFMs) and other scanning probe microscopes, as well as profilometers and confocal optical microscopes. This allows the selective imaging of particular regions of a sample surface for accurate measurement of critical dimensions within a relatively small data acquisition time.
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