Integrated circuit configured with two or more single crystal acoustic resonator devices
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United States of America Patent
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Jun 7, 2016
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app pub date -
Jul 10, 2015
filing date -
Jun 6, 2014
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Abstract
A configurable single crystal acoustic resonator (SCAR) device integrated circuit. The circuit comprises a plurality of SCAR devices numbered from 1 through N, where N is an integer of 2 and greater. Each of the SCAR device has a thickness of single crystal piezo material formed overlying a surface region of a substrate member. The single crystal piezo material is characterized by a dislocation density of less than 1012 defects/cm2.
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