Methods to form conductive thin film structures
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United States of America Patent
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Jun 7, 2016
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N/A
app pub date -
May 27, 2015
filing date -
May 27, 2015
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Abstract
Electrically conductive structures and methods of making electrically conductive structures. The methods include providing a dielectric layer of a material having a top surface and a dielectric constant of less than 3; rastering a gas cluster ion beam to form a patterned modified surface region of the top surface of the dielectric layer; and selectively forming an electrically conductive thin film on the patterned modified surface region using atomic layer deposition.
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