Electro-optical element for multiple beam alignment
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United States of America Patent
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Jun 7, 2016
Grant Date -
Nov 1, 2012
app pub date -
Apr 27, 2012
filing date -
Apr 28, 2011
priority date (Note) -
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Abstract
The invention relates to a charged particle system for processing a target surface with at least one charged particle beam. The system comprises an optical column with a beam generator module for generating a plurality of charged particle beams, a beam modulator module for switching on and off said plurality of beams and a beam projector module for projecting beams or subbeams on said target surface. The system further comprises a frame supporting each of said modules in a fixed position and alignment elements for aligning at least one of beams and/or subbeams with a downstream module element.
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