Apparatus and method for polarization diversity imaging and alignment
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United States of America Patent
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Jun 7, 2016
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May 16, 2013
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Nov 16, 2012
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Nov 16, 2011
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Abstract
A method of obtaining two orthogonally polarized super-resolution images is provided. A first diffraction-limited image is obtained using horizontally polarized light; a second diffraction-limited image is obtained using vertically polarized light; and, the first and second images are processed so as to yield a convoluted image having super diffraction-limited performance in both dimensions. Enhanced alignment of CAD image to acquired image is facilitated using the horizontally and vertically polarized images.
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