System for determining average ellipsometric parameters for planar or non-planar shaped objects, and method of its use

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United States of America Patent

PATENT NO 9360369
SERIAL NO

14545786

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Abstract

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A system for easily determining average ellipsometric parameters based on data obtained from two different locations on a planar or non-planar shaped object, along with its method of use.

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Patent Owner(s)

Patent OwnerAddress
J A WOOLLAM CO INC645 M ST LINCOLN NE 68508

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liphardt, Martin M Lincoln, US 120 807
Pfeiffer, Galen L Roca, US 39 448

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