Micromachined mass flow sensor with condensation prevention and method of making the same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jun 7, 2016
Grant Date -
Sep 25, 2014
app pub date -
Mar 19, 2013
filing date -
Mar 19, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The design and manufacture method of a silicon mass flow sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of gas flow measurement with highly humidified or liquid vapors is disclosed in the present invention. The said silicon mass flow sensor operates with an embedded heater and an adjacent control temperature sensor beneath the integrated calorimetric and thermal dissipative sensing thermistors. When the condensation takes place at the surface of the said silicon mass flow sensor, the embedded heater shall be turned on to elevate the temperature of the supporting membrane or substrate for the sensing thermistors. The elevated temperature shall be adjusted to above the vaporization temperature with the feedback data of the adjacent temperature sensor such that the surface condensation due to the presence of the liquid vapors in a gas flow can be effectively eliminated.
First Claim
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International Classification(s)
- 2013 Application Filing Year
- G01F Class
- 876 Applications Filed
- 790 Patents Issued To-Date
- 90.19 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- G01F Class
- 14.40 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Dec 7, 2027 |
