Replication of patterned thin-film structures for use in plasmonics and metamaterials
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United States of America Patent
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May 31, 2016
Grant Date -
Jun 25, 2015
app pub date -
Dec 22, 2014
filing date -
Nov 25, 2008
priority date (Note) -
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Abstract
The present invention provides templating methods for replicating patterned metal films from a template substrate such as for use in plasmonic devices and metamaterials. Advantageously, the template substrate is reusable and can provide plural copies of the structure of the template substrate. Because high-quality substrates that are inherently smooth and flat are available, patterned metal films in accordance with the present invention can advantageously provide surfaces that replicate the surface characteristics of the template substrate both in the patterned regions and in the unpatterned regions.
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International Classification(s)
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B05D:PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MAT....
- B82Y:SPECIFIC USES OR APPLICATIONS OF NANO-STRUCTURES; ....
- B81C:PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE M....
- G02B:OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
- G03F:PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNE....
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