Method of producing a junction field-effect transistor (JFET)
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 31, 2016
Grant Date -
Dec 3, 2015
app pub date -
Sep 5, 2012
filing date -
Sep 5, 2012
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The invention concerns a method for producing a field effect transistor having a trench gate comprising: —the forming (110) of at least one trench (11, 12, 13) in a semi-conductive substrate (1) having a first type of conductivity, said substrate comprising two opposing faces called front face and rear face, —the primary implantation (120) of ions having a second type of conductivity so as to implant each trench of the substrate to form an active gate area, —the depositing (160) of a layer of polycrystalline silicon having the second type of conductivity on the implanted active gate area, —the oxidation (160) of the layer of polycrystalline silicon, and —the metallization (180) of the substrate on the front and rear faces of same in order to form active source and drain areas.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully