Ion source
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United States of America Patent
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May 31, 2016
Grant Date -
Sep 5, 2013
app pub date -
Feb 26, 2013
filing date -
Mar 5, 2012
priority date (Note) -
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Abstract
According to one embodiments, an ion source connected with a vacuum-exhausted downstream apparatus is provided. The ion source includes a vacuum chamber which is vacuum-exhausted, a target which is set in the vacuum chamber and generates ions by irradiation of a laser beam, a transportation unit which transports the ions generated by the target to the downstream apparatus, and a vacuum sealing unit which seals the transportation unit so as to separate vacuum-conditions of the vacuum chamber side and the downstream apparatus side before exchanging the target set in the vacuum chamber.
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