Micromachined oxygen sensor and method of making the same
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United States of America Patent
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May 31, 2016
Grant Date -
Oct 30, 2014
app pub date -
Apr 25, 2013
filing date -
Apr 25, 2013
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Abstract
The design and manufacture method of an oxygen concentration sensor made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of oxygen measurement with fast response time and low power consumption is disclosed in the present invention. The said silicon oxygen concentration sensor operates with an yttrium stabilized zirconia oxide amperometric cell supported on a membrane made of silicon nitride with a heat isolation cavity underneath or a silicon nitride membrane with silicon plug for mechanical strength enforcement.
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