Method and device for producing short-chain halogenated polysilanes

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United States of America Patent

PATENT NO 9353227
APP PUB NO 20120308464A1
SERIAL NO

13512905

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Abstract

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A method and a device produce short-chain halogenated polysilanes and/or short-chain halogenated polysilanes and halide-containing silicon by thermolytic decomposition of long-chain halogenated polysilanes. The thermolytic decomposition of long-chain halogenated polysilanes diluted with low-molecular halosilanes is carried out under an atmosphere of halosilanes, thereby ensuring the production of such products at industrial scale in a simple and cost-effective manner.

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Patent Owner(s)

Patent OwnerAddress
NAGARJUNA INDUSTRIAL SERVICES AND INVESTMENTS PRIVATE LTDSUITE G12 ST JAMES COURT ST DENIS STREET PORT LOUIS

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bauch, Christian Muldenstein, DE 32 65
Deltschew, Rumen Leipzig, DE 26 60
Holl, Sven Gueckingen, DE 24 33
Lippold, Gerd Leipzig, DE 21 55
Mohsseni, Javad Bitterfeld-Wolfen, DE 21 21
Towara, René Schlaitz, DE 1 4

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