Method and apparatus for production of silane and hydrohalosilanes

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United States of America Patent

PATENT NO 9352971
APP PUB NO 20140369918A1
SERIAL NO

13918609

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Abstract

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Silane and hydrohalosilanes of the general formula HySiX4-y (y=1, 2, or 3) are produced by reactive distillation in a system that includes a fixed-bed catalytic redistribution reactor that can be back-flushed during operation.

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Patent Owner(s)

Patent OwnerAddress
REC SILICON INC3322 ROAD N NE MOSES LAKE WA 98837

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Breneman, William C Moses Lake, US 14 132

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