X-RAY diffraction apparatus, X-RAY diffraction measuring method, and control program
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United States of America Patent
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May 24, 2016
Grant Date -
Oct 23, 2014
app pub date -
Mar 4, 2014
filing date -
Apr 17, 2013
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Abstract
The X-ray diffraction apparatus irradiates a sample with an X-ray and performs frame photographing in each X-ray diffraction angle, and includes a control section (141) controlling the frame photographing by scanning without closing a shutter, a data acquisition section (142) acquiring detection data of each frame which has been detected by a semiconductor pixel detector in the frame photographing, a frame integration section (146) integrating the detection data which has been acquired in each scanning for each frame, and a determination section (147) determining whether the integrated detection data has a sufficient intensity or not, and the control section (141) controls so as to finish measurement when the integrated detection data has a sufficient intensity and so as to perform the scanning again when the integrated detection data does not have a sufficient intensity.
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