In line ellipsometer system and method of use

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United States of America Patent

PATENT NO 9347768
SERIAL NO

13385761

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Abstract

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A system for monitoring, in real time, relatively large samples as they are caused to pass by an ellipsometer or the like system, and method of its use.

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Patent Owner(s)

Patent OwnerAddress
J A WOOLLAM CO INC645 M ST LINCOLN NE 68508

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guenther, Brian D Lincoln, US 9 58
Hale, Jeffrey S Lincoln, US 35 164
Johs, Blaine D Lincoln, US 103 2290
Liphardt, Martin M Lincoln, US 120 807
Pfeiffer, Galen L Lincoln, US 39 448

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