Cleanroom

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United States of America Patent

PATENT NO 9347681
APP PUB NO 20140087650A1
SERIAL NO

13642545

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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The present invention provides a cleanroom for storing glass substrates, and which comprises an exhaust is disposed on a bottom floor of the cleanroom. A first filtering device is arranged on a ceiling of the cleanroom to provide purified airflow to the cleanroom. A second filtering device is arranged on the bottom floor of the cleanroom jointly to create a vertical airflow with the first filtering device so as to reduce the turbulence within the cleanroom. The present invention can readily resolve the prior art issue in which the airborne particles stirred by turbulence within the cleanroom cannot be effectively eliminated.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO LTDNO 9-2 TANGMING RD GUANGMING NEW DISTRICT SHENZHEN GUANGDONG 518132

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guo, Zhenhua Shenzhen, CN 93 228
Jiang, Yunshao Shenzhen, CN 53 114
Lin, Kunhsien Shenzhen, CN 59 124
Shu, Zhiyou Shenzhen, CN 41 111
Wang, Yongqiang Shenzhen, CN 146 785
Wu, Chunhao Shenzhen, CN 60 124

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