Multilayer hard film and method for producing same
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United States of America Patent
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May 17, 2016
Grant Date -
Dec 11, 2014
app pub date -
Dec 14, 2012
filing date -
Dec 15, 2011
priority date (Note) -
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Abstract
Provided is a multilayer hard film capable of elongating a lifetime of a member. A multilayer hard film (1) is formed by alternately stacking a layer A (11) made of Ti1-xSix(BpCqNr) [where 0.05≦x≦0.4, p≧0, q≧0, r>0, p+q+r=1], and a layer B (12) made of at least one selected from the group of Ti1-a-g-bBaCgNb [where 0.05≦a≦0.5, 0.25≦b≦0.6, 0≦g≦0.5], Si1-c-dCcNd [where 0.2≦c≦0.5, 0.25≦d≦0.5], B1-e-fCeNf [where 0.03≦e≦0.25, 0.3≦f≦0.55], TiB2, SiC and B4C, one another over the surface of the substrate (2).
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