Vibration element, vibrator, oscillator, electronic apparatus, and moving object
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United States of America Patent
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May 10, 2016
Grant Date -
Oct 2, 2014
app pub date -
Mar 27, 2014
filing date -
Mar 29, 2013
priority date (Note) -
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Abstract
A vibration element includes a piezoelectric substrate including a vibrating section and a thick section having a thickness larger than that of the vibrating section. The thick section includes a first thick section provided along a first outer edge of the vibrating section, a second thick section provided along a second outer edge thereof, and a third thick section provided along a third outer edge thereof. When a maximum size of the second thick section in the vibration direction is Lmax and a minimum size thereof is Lmin, an average size expressed by (Lmax+Lmin)/2 is 100 μm or smaller.
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