Method for making an imprint template with data regions and non-data regions using block copolymers
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United States of America Patent
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May 10, 2016
Grant Date -
Mar 3, 2016
app pub date -
Aug 28, 2014
filing date -
Aug 28, 2014
priority date (Note) -
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Abstract
A method to fabricate an imprint template for bit-patterned magnetic recording media using block copolymers (BCPs) integrates data region patterning and servo region patterning. A heat sink layer is formed on the imprint substrate only in the data regions. A sublayer for the BCP is deposited over both the data regions and the servo regions and patterned to form stripes in the data regions and servo features in the servo regions. A BCP is then deposited in both the data and servo regions. Only the BCP in the data regions is heated, which causes phase separation of the BCP in the data regions into the two BCP components. The selective heating may be accomplished by directed controlled laser radiation to only the data regions. The heat sink layer below the data regions absorbs the heat from the laser radiation, confining it to the data regions.
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International Classification(s)
- C03C:CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREO....
- H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....
- B23P:OTHER WORKING OF METAL; COMBINED OPERATIONS; UNIVE....
- G11B:INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BET....
- C23F:NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM S....
- B44C:PRODUCING DECORATIVE EFFECTS
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