Method of measuring an interaction force
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United States of America Patent
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May 10, 2016
Grant Date -
Apr 25, 2013
app pub date -
Nov 28, 2012
filing date -
Jul 3, 2008
priority date (Note) -
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Abstract
A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.
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