Method for sputter targets for electrolyte films
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United States of America Patent
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May 10, 2016
Grant Date -
Jun 25, 2009
app pub date -
Dec 19, 2008
filing date -
Dec 21, 2007
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Abstract
Alternative sputter target compositions or configurations for thin-film electrolytes are proposed whereby the sputter target materials system possesses sufficient electrical conductivity to allow the use of (pulsed) DC target power for sputter deposition. The electrolyte film materials adopt their required electrically insulating and lithium-ion conductive properties after reactive sputter deposition from the electrically conducting sputter target materials system.
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