Process for producing structure with metal film, mother die for use in the process, and structure produced by the process

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United States of America Patent

PATENT NO 9332651
APP PUB NO 20100308204A1
SERIAL NO

12675537

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Abstract

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The invention provides is a process for producing a structure (22) with a metal film, including the steps of preparing a mother die (10) in which a first metal film (16) is formed on the surface of a base (12) on which a concave and convex pattern (14) is formed, forming a second metal film (18) on the first metal film (16), adhering a support member (20) to the second metal film (18), and separating the second metal film (18) to which the concave and convex pattern has been transferred to the second metal film (18) together with the support member from the first metal film (16). Preferably, the first metal film (16) is a film containing Cr and Al, and the second metal film (18) is a film containing at least one metal selected from the group consisting of Au, Ag, Cu, Al, and Pt.

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Patent Owner(s)

Patent OwnerAddress
TOKYO UNIVERSITY OF SCIENCE EDUCATIONAL FOUNDATION ADMINISTRATIVE ORGANIZATIONSHINJUKU-KU TOKYO 162-8601

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Taniguchi, Jun Tokyo, JP 46 370

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