Vibrator with a beam-shaped portion above a recess in a substrate, and oscillator using same
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
May 3, 2016
Grant Date -
Oct 2, 2014
app pub date -
Mar 18, 2014
filing date -
Mar 27, 2013
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method for manufacturing a vibrator according to the present invention includes: forming a coating layer that covers a silicon substrate; patterning the coating layer; forming a semiconductor layer that covers the silicon substrate and the coating layer; forming a vibrating portion having a beam shape on the coating layer and a support portion that supports the vibrating portion by patterning the semiconductor layer; forming an opening that exposes the silicon substrate; forming a recess portion by removing the silicon substrate through the opening; and removing the coating layer. In the step of forming the vibrating portion and the support portion, the support portion having a first portion that is located on the silicon substrate, and a second portion that connects the first portion and the vibrating portion and is located on the coating layer is formed.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2014 Application Filing Year
- H03B Class
- 380 Applications Filed
- 341 Patents Issued To-Date
- 89.74 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H03B Class
- 0 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Nov 3, 2027 |
