Actuator having two piezoelectric elements on a membrane
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United States of America Patent
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May 3, 2016
Grant Date -
Apr 23, 2015
app pub date -
Oct 1, 2014
filing date -
Sep 18, 2009
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Abstract
The present invention relates to an actuator for moving a rigid element, e.g. an optical element such as mirror, the element being mechanically coupled to a frame with a bendable coupling, wherein actuator elements are mounted on said coupling between the frame and element, the coupling and actuator elements being adapted to provide a movement to the element when subject to signal from a signal generator.
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