Microvalve having improved air purging capability
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United States of America Patent
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May 3, 2016
Grant Date -
Dec 25, 2014
app pub date -
Jun 24, 2014
filing date -
Jun 24, 2013
priority date (Note) -
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status (Latency Note)
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Abstract
A microvalve includes a base plate having a surface defining an actuator cavity. A venting groove extends from a first cavity portion of the actuator cavity having a dead end region to a second cavity portion of the actuator cavity having a structure that can vent air from the microvalve. A cover plate includes a surface having an actuator cavity provided therein that includes a first cavity portion having a dead end region and a second cavity portion having a structure that can vent air from the microvalve. An intermediate plate includes a displaceable member that is disposed within the actuator cavity for movement between a closed position, wherein the displaceable member prevents fluid communication through the microvalve, and an opened position, wherein the displaceable member does not prevent fluid communication through the microvalve.
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