Apparatus and method for coating substrate
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United States of America Patent
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May 3, 2016
Grant Date -
Oct 11, 2012
app pub date -
Dec 29, 2010
filing date -
Jan 4, 2010
priority date (Note) -
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Abstract
An apparatus and a method for producing a liquid film from one or more liquid precursors onto the surface of a substrate in order to establish a coating, the apparatus being arranged to direct an aerosol flow against the surface of the substrate in a coating chamber. The apparatus includes a homogenizing nozzle for making the aerosol flow homogeneous substantially in the direction of the surface of the substrate prior to passing the flow into the coating chamber.
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