Excimer laser composite cavity
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United States of America Patent
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Apr 26, 2016
Grant Date -
Dec 24, 2015
app pub date -
Dec 20, 2012
filing date -
Dec 20, 2012
priority date (Note) -
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Abstract
Disclosed is an excimer laser composite cavity, comprising a laser discharge cavity, a laser output module, a line-width narrowing module, and a laser amplification module. The laser discharge cavity contains work gas for generating laser when it is activated by an excitation source. The laser discharge cavity, the laser output module, and the line-width narrowing module constitute a line-width narrowing cavity configured to narrow down a line-width of the laser generated by the work gas. The laser discharge cavity, the laser output module, and the laser amplification module constitute an amplification cavity configured to amplify power of the laser with the line-width having been narrowed down by the line-width narrowing cavity.
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