Silicon carbide MOSFET with integrated MOS diode

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United States of America Patent

PATENT NO 9324807
SERIAL NO

14796142

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Abstract

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A monolithically integrated MOS channel in gate-source shorted mode is used as a diode for the third quadrant conduction path for a power MOSFET. The MOS diode and MOSFET can be constructed in a variety of configurations including split-cell and trench. The devices may be formed of silicon carbide, gallium nitride, aluminum nitride, aluminum gallium nitride, diamond, or similar semiconductor. Low storage capacitance and low knee voltage for the MOS diode can be achieved by a variety of means. The MOS diode may be implemented with channel mobility enhancement materials, and/or have a very thin/high permittivity gate dielectric. The MOSFET gate conductor and MOS diode gate conductor may be made of polysilicon doped with opposite dopant types. The surface of the MOS diode dielectric may be implanted with cesium.

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Patent Owner(s)

Patent OwnerAddress
UNITED SILICON CARBIDE INC7 DEER PARK DRIVE SUITE E MONMOUTH JUNCTION NJ 08852

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bhalla, Anup Princeton Junction, US 325 5864
Fursin, Leonid Monmouth Junction, US 9 128

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