Two-shaft drive mechanism and die bonder
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United States of America Patent
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Apr 26, 2016
Grant Date -
Aug 29, 2013
app pub date -
Aug 16, 2012
filing date -
Feb 29, 2012
priority date (Note) -
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Abstract
A two-shaft drive mechanism includes a processing unit, a first linear motor provided with a first movable portion and a first fixed portion, which elevates the processing unit along a first linear guide, and a second linear motor provided with a second movable portion and a second fixed portion, which moves the processing unit in a horizontal direction vertical to the direction for elevating the processing unit, a support body that fixes the first fixed portion, a second linear guide that is provided between the support body and the second fixed portion, and allows the second fixed portion to freely move, and a control unit that controls a position of the first movable portion in the horizontal direction based on an output of the linear sensor that detects a position of the first movable portion in a horizontal direction with respect to the support body.
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