Semiconductor device including a stress buffer material formed above a low-k metallization system

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United States of America Patent

PATENT NO 9324631
APP PUB NO 20130234300A1
SERIAL NO

13870411

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Abstract

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A bump structure or pillar structure formed above a metallization system of a complex semiconductor device may include a stress buffer layer, which may efficiently distribute the resulting mechanical stress which may typically occur during the chip package interaction due to a thermal mismatch of these components. The stress buffer layer comprises copper-based buffer regions that cover a significant portion of the overall surface, wherein a thickness of approximately 3-10 μm may also be used. Moreover, the buffer regions may efficiently replace aluminum as a terminal metal active region.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDNO 8 LI-HSIN RD 6 SCIENCE-BASED INDUSTRIAL PARK HSINCHU 300

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lehr, Matthias Dresden, DE 81 1360
Walter, Axel Radebeul, DE 6 426

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