Controlling template surface composition in nano-imprint lithography
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United States of America Patent
Stats
-
Apr 26, 2016
Grant Date -
Aug 6, 2009
app pub date -
Feb 3, 2009
filing date -
Feb 5, 2008
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A nano-imprint lithography process includes forming a multiplicity of hydroxyl groups on a surface of a substantially inorganic nano-imprint lithography template, heating the template, and reacting a pre-selected percentage of the hydroxyl groups on the surface of the template with a mono-functional, non-fluorinated compound to form a monolayer coating on the surface of the nano-imprint lithography template. The coated template may be contacted with a polymerizable composition disposed on a nano-imprint lithography substrate, and the polymerizable composition solidified to form a patterned layer. The coated template is separated from the patterned layer.
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International Classification(s)
- 2009 Application Filing Year
- B82Y Class
- 782 Applications Filed
- 312 Patents Issued To-Date
- 39.90 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- B82Y Class
- 0 % this patent is cited more than
- 9 Age
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|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 26, 2027 |
