Apparatus for substrate treatment and heating apparatus

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United States of America Patent

PATENT NO 9318359
APP PUB NO 20130294756A1
SERIAL NO

13886261

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Abstract

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The present invention relates to an apparatus for heat-treating a substrate, and more particularly to an apparatus for substrate treatment to perform a heat treatment of a substrate for a flat panel display panel.

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Patent Owner(s)

Patent OwnerAddress
AP SYSTEMS INCSOUTH CHINA GYEONGGI DO CITY EAST BEACH SURFACE EAST BEACH PRODUCTION GROUP 8 PASSES 15-5 (POSTAL CODE 18487) HWASEONG GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Seung-Ae Hwaseong-Si, KR 1 6
Kim, Chul-Soo Boryeong-Si, KR 53 535
Lim, Il-Hwan Seongnam-Si, KR 1 6
Shim, Jang-Woo Hwaseong-Si, KR 1 6

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