Process chamber incorporating an arrangement for injecting gaseous fluid thereinto
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United States of America Patent
Stats
-
Apr 19, 2016
Grant Date -
Sep 12, 2013
app pub date -
Apr 29, 2013
filing date -
Oct 28, 2010
priority date (Note) -
In Force
status (Latency Note)
Importance
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Abstract
A process chamber (5) has an interior space (39). In the interior space (39), there is a receiving region (15) for workplaces (3). The process chamber (5) has an opening (12, 14) for the entry and exit of workplaces (3). The process chamber includes an arrangement (17, 19, 25, 29, 33, 37, 35) for injecting gaseous fluid into the interior space (39). The arrangement for injecting gaseous fluid has at least one nozzle (17, 19) for producing a fluid flow curtain (21, 23) between the opening (12, 14) and the receiving region (15) for workplaces (3).
First Claim
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International Classification(s)
- 2013 Application Filing Year
- F26B Class
- 321 Applications Filed
- 285 Patents Issued To-Date
- 88.79 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 9 Citation Count
- F26B Class
- 21.61 % this patent is cited more than
- 9 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Oct 19, 2027 |
