Micro pick up array with integrated pivot mount
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United States of America Patent
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Apr 19, 2016
Grant Date -
Jun 19, 2014
app pub date -
Dec 14, 2012
filing date -
Dec 14, 2012
priority date (Note) -
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Abstract
Systems and methods for transferring a micro device from a carrier substrate include, in an embodiment, a micro pick up array structure to allow the micro pick up array to automatically align with the carrier substrate. Deflection of the micro pick up array may be detected to control further movement of the micro pick up array.
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