Sensor device integrated with ultrasonic transducer and microphone and manufacturing method thereof
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United States of America Patent
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Apr 12, 2016
Grant Date -
Oct 1, 2015
app pub date -
Aug 8, 2014
filing date -
Mar 26, 2014
priority date (Note) -
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Abstract
A manufacturing method of a sensor device integrated with ultrasonic transducer and microphone is to form a first support structure, a back plate, a second support structure, a membrane and electrodes on a substrate. The substrate is divided into a first region and a second region. The first electrode, the third electrode, a part of the back plate, a part of the second support structure and a part of the membrane that are above the first region form the ultrasonic transducer. The first support structure, the second electrode, the fourth electrode, a part of the back plate, a part of the second support structure and a part of the membrane that are above the second region form the microphone. The ultrasonic transducer and the microphone are simultaneously manufactured.
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