Nonvolatile semiconductor memory transistor and method for manufacturing nonvolatile semiconductor memory
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United States of America Patent
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Apr 12, 2016
Grant Date -
Dec 17, 2015
app pub date -
Aug 27, 2015
filing date -
Jul 27, 2010
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Abstract
A nonvolatile semiconductor memory transistor includes an island-shaped semiconductor having a source region, a channel region, and a drain region formed in this order from the silicon substrate side, a floating gate arranged so as to surround the outer periphery of the channel region with a tunnel insulating film interposed between the floating gate and the channel region, a control gate arranged so as to surround the outer periphery of the floating gate with an inter-polysilicon insulating film interposed between the control gate and the floating gate, and a control gate line electrically connected to the control gate and extending in a predetermined direction. The inter-polysilicon insulating film is interposed between the floating gate and the lower and inner side surfaces of the control gate and between the floating gate and the lower surface of the control gate line.
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