Coil antenna with plural radial lobes

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United States of America Patent

PATENT NO 9312104
SERIAL NO

14107137

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Abstract

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A low inductance coil antenna for a plasma reactor has plural conductor lobes extending radially from respective RF supply connections.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Banna, Samer San Jose, US 71 3635
Knyazik, Vladimir Palo Alto, US 30 670
Tantiwong, Kyle R Livermore, US 4 28

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