Device for amplifying a laser beam

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United States of America Patent

PATENT NO 9306367
APP PUB NO 20130272327A1
SERIAL NO

13804266

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Abstract

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A device for amplifying a laser beam is provided. The device includes at least one amplifier chamber in which a laser-active material is provided, at least one transmitting optical member delimiting the amplifier chamber and being arranged at a tilt angle, α, with respect to a plane oriented perpendicularly with respect to an optical axis of the laser beam, and at least one detection unit. The laser beam is reflected by the transmitting optical member into a back reflected laser beam, and the detection unit is arranged such that it detects the back reflected laser beam.

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Patent Owner(s)

Patent OwnerAddress
TRUMPF LASERSYSTEMS FOR SEMICONDUCTOR MANUFACTURING GMBHDITZINGEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mueller, Oliver Moelingen, DE 31 373
Schulz, Joachim Gerlingen, DE 57 633

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