Extreme ultraviolet source with magnetic cusp plasma control
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United States of America Patent
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Mar 29, 2016
Grant Date -
Jan 7, 2016
app pub date -
Sep 14, 2015
filing date -
Jun 27, 2014
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Abstract
A laser-produced plasma extreme ultraviolet source has a buffer gas to slow ions down and thermalize them in a low temperature plasma. The plasma is initially trapped in a symmetrical cusp magnetic field configuration with a low magnetic field barrier to radial motion. Plasma overflows in a full range of radial directions and is conducted by radial field lines to a large area annular array of beam dumps.
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