Monolithic body MEMS devices
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United States of America Patent
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Mar 29, 2016
Grant Date -
Dec 11, 2014
app pub date -
Jul 12, 2013
filing date -
Jun 5, 2013
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Abstract
A technique decouples a MEMS device from sources of strain by forming a MEMS structure with suspended electrodes that are mechanically anchored in a manner that reduces or eliminates transfer of strain from the substrate into the structure, or transfers strain to electrodes and body so that a transducer is strain-tolerant. The technique includes using an electrically insulating material embedded in a conductive structural material for mechanical coupling and electrical isolation.
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