Wide metal-free plasma flood gun
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United States of America Patent
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Mar 29, 2016
Grant Date -
Apr 23, 2015
app pub date -
Oct 17, 2013
filing date -
Oct 17, 2013
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Abstract
In one embodiment an apparatus to provide electrons to a substrate includes a plurality of helicon plasma sources arranged in a helicon source array, wherein each helicon plasma source comprises a helical antenna configured to generate a wave vector parallel to a first axis; and a magnet configured to generate a magnetic field vector parallel to the first axis, wherein each helicon plasma source is further configured to generate a respective magnetic field vector that is opposite that of a magnetic field vector of an adjacent helicon plasma source.
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