Air-blown cleaning system for photomasks and method thereof
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United States of America Patent
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Mar 29, 2016
Grant Date -
Jun 5, 2014
app pub date -
Feb 8, 2013
filing date -
Dec 3, 2012
priority date (Note) -
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Abstract
An air-blown cleaning system for cleaning a photomask includes an image capturing module, an identification and control module, and an air knife device. The image capturing module captures an image of the photomask and divided the image into a plurality of sections for the identification and control module to identify particular sections with contaminants for subsequent cleaning and to store such data into a database. The air knife device includes at least one air knife module which receives data from the database and controls the air knife module to air blow the particular sections with contaminants. The instant disclosure also includes a method of air blow cleaning for cleaning a photomask.
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