Nozzle device with a plurality of piezoelectric plate module
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United States of America Patent
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Mar 29, 2016
Grant Date -
Feb 4, 2016
app pub date -
Sep 21, 2015
filing date -
Jul 31, 2014
priority date (Note) -
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Abstract
A nozzle device includes an upper cover module having a cavity, a plurality of stacked piezoelectric plate modules, a plug module, and a lower cover module. Each piezoelectric plate module includes a substrate, a piezoelectric material, an electrical connection, an upper electrode, and a lower electrode. The substrate includes multiple first through holes disposed correspondingly to the cavity. The piezoelectric material is located on the upper surface of the substrate. The electrical connection extends from the lower surface of the substrate, through the substrate, and to the bottom of the piezoelectric material. The lower electrode is located below the lower surface of the substrate and electrically connects to the electrical connection. The plug module includes plugs and second through holes corresponding to the first through holes. The lower cover module includes openings disposed according to the plugs of the plug module.
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