Laser crystallization apparatus and method
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United States of America Patent
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Mar 22, 2016
Grant Date -
Jan 16, 2014
app pub date -
Mar 14, 2013
filing date -
Jul 10, 2012
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Abstract
A laser crystallization apparatus includes a laser generator that generates a laser beam, a stage mounted with an object substrate with an object thin film to which the laser beam is firstly incident, the stage is relatively movable such that the laser beam scans the object thin film for crystallization, and a reflection mirror that secondly reflects a second reflection laser beam to the object thin film from a first reflection laser beam that is reflected from the object thin film to the reflection mirror.
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