Probe actuation
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United States of America Patent
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Mar 22, 2016
Grant Date -
Jan 8, 2015
app pub date -
Jan 29, 2013
filing date -
Jan 31, 2012
priority date (Note) -
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Abstract
A method of driving a probe of a scanning probe microscope. The intensities of first and second radiation beams are modulated; and the beams are directed simultaneously onto the probe whereby each beam heats the probe and causes the probe to deform, typically by the photothermal effect. The optical system is arranged to direct the centers of the beams onto different locations on the probe. This enables the location of each beam to be chosen to optimize its effect. A lens receives the first and second beams and focuses them onto the probe. A beam combiner is arranged to receive and combine the beams and direct the combined beams towards the probe.
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