Method of forming organic polymer thin film and an apparatus for forming the organic polymer thin film
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United States of America Patent
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Mar 22, 2016
Grant Date -
Apr 21, 2011
app pub date -
Oct 13, 2010
filing date -
Oct 15, 2009
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Abstract
A technique for forming an organic polymer thin film on a surface of a substrate with high film formation efficiency and excellent reproducibility and stability is provided. When a vacuum deposition polymerization for forming an organic polymer thin film is performed on a surface of a substrate repeatedly, in which a plurality of kinds of monomers evaporated in a plurality of evaporation source containers in vacuum state are introduced into a deposition chamber in a vacuum state and polymerized on a surface of the substrate arranged in the deposition chamber, each of the monomers in a liquid form is present in the evaporation source containers in a constant amount every time, at the beginning of the evaporation operation of monomers.
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