Hybrid inorganic-organic polymer compositions for anti-reflective coatings
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United States of America Patent
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Mar 15, 2016
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app pub date -
Jun 13, 2007
filing date -
Jun 13, 2006
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Abstract
An organic-inorganic composition, which has a backbone containing —Si—O— units with chromophore groups attached directly to at least a part of the silicon atoms. The film forming composition and resulting coating properties can be tailored to suit the specific exposure wavelength and device fabrication and design requirements. By using two different chromophores the refractive index and the absorption co-efficient can be efficiently tuned and a desired Si-content of the anti-reflective coating composition can be obtained—a high Si-content will give good mechanical and thermal properties and also the required wet etch and dry etch properties.
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