MEMS device and method of making a MEMS device

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United States of America

PATENT NO 9284184
SERIAL NO

13439729

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Abstract

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A MEMS device and a method of making a MEMS device are disclosed. In one embodiment a semiconductor device comprises a substrate, a moveable electrode and a counter electrode, wherein the moveable electrode and the counter electrode are mechanically connected to the substrate. The movable electrode is configured to stiffen an inner region of the movable membrane.

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Patent Owner(s)

  • INFINEON TECHNOLOGIES AG

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dehe, Alfons Reutlingen, DE 163 2622
Herzum, Christian Starnberg, DE 15 165
Wurzer, Martin Munich, DE 13 255

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