Method for forming normally closed micromechanical device comprising a laterally movable element
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United States of America Patent
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Mar 15, 2016
Grant Date -
Feb 20, 2014
app pub date -
Feb 11, 2013
filing date -
Mar 4, 2005
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Abstract
A micromechanical device and a method for forming the device is disclosed, wherein the micromechanical device has a laterally movable mechanically active element that has a quiescent position in which it is in physical contact with a second structural element. The device is fabricating by disposing the mechanically active element on a first substrate and disposing the second structural element on a second substrate. After the two substrates are aligned and joined such that both the mechanically active element and the second structural element are in contact and affixed to one of the substrates, the other substrate is removed leaving all structural elements disposed on a single substrate.
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